Creep Compensation in an Electrostatic PDMS-Membrane Actuator with Flexible Silver Nanowire Electrodes

Proceedings

Straub, Nils¹  Schierle, Stefan²  Woias, Peter³ 

[1] Author to whom correspondence should be addressed.;Laboratory for the Design of Microsystems, Department of Microsystems Engineering—IMTEK, University of Freiburg, 79110 Freiburg, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: PDMS-membrane;    silver nanowire;    electrostatic actuator;    viscoelastic creep compensation;   

DOI  :  10.3390/proceedings2131088

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

An electrostatic membrane actuator with an elastomer membrane as movable part and silver nanowires (AgNWs) as flexible electrode material is built and characterized. A layered and modular actuator design facilitates simple and fast modification of actuator properties for characterization purposes. The tested actuators allow a membrane center deflection in the range of over 50 μm with applied voltages lower than 1 kV. The observable membrane center deflection exhibits a viscoelastic creep behavior. With the aim to achieve a more stable membrane deflection, a simple correction function was applied to the constant electrode voltage thus compensating the linear creep rate. With this method, the creep rate was changed from +0.27 μm/s to −0.08 μm/s. This method already improves the stability of the actuator deflection to a high degree.

【 授权许可】

CC BY