Exchangeable Miniaturized Mass Spectrometer Chip Based on Silicon Structures

Proceedings

Musch, Thomas¹  Hermanns, Patrick²  Janßen, Benedikt³  Westerdick, Stephan⁴ 

[1] Author to whom correspondence should be addressed.;Electrical Engineering and Plasma Technology, Ruhr University Bochum, 44801 Bochum, Germany;Embedded Systems for Information Technology, Ruhr University Bochum, 44801 Bochum, Germany;Institute of Electronic Circuits, Ruhr University Bochum, 44801 Bochum, Germany

关键词: micro-mass spectrometer;    MEMS-Chip;    silicon-chip;    spring-loaded pin;    o-ring;    LiGa-technology;    travelling wave;   

DOI  :  10.3390/proceedings2131071

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 µm high silicon structures between two borosilicate glasses and has a size of 13 mm × 7 mm. Because of its small size a small vacuum pump is sufficient, and it is suitable for mobile measurements and portable applications. Because of exchangeability of MEMS-chips with fluidic and electrical high voltage connections a direct comparison between chips is possible.

【 授权许可】

CC BY