期刊论文详细信息
Proceedings | |
Squared PMUT with Enhanced Pressure Sensitivities | |
Torres, Francesc1  Ledesma, Eyglis2  Uranga, Arantxa3  Zamora, Iván4  | |
[1] Author to whom correspondence should be addressed.;Electronics Eng. Dept, Universitat Autónoma de Barcelona, 08193-Bellaterra, Spain;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9â12 September 2018;Silterra Malaysia Sdn. Bhd, Kulim 09090, Malaysia | |
关键词: piezoelectric micromachined ultrasonic transducer (PMUT); differential excitation; transmitting sensitivity; receiving sensitivity; | |
DOI : 10.3390/proceedings2130925 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.
【 授权许可】
CC BY
【 预 览 】
Files | Size | Format | View |
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RO201910253812161ZK.pdf | 651KB | download |