Squared PMUT with Enhanced Pressure Sensitivities

Proceedings

Torres, Francesc¹  Ledesma, Eyglis²  Uranga, Arantxa³  Zamora, Iván⁴ 

[1] Author to whom correspondence should be addressed.;Electronics Eng. Dept, Universitat Autónoma de Barcelona, 08193-Bellaterra, Spain;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;Silterra Malaysia Sdn. Bhd, Kulim 09090, Malaysia

关键词: piezoelectric micromachined ultrasonic transducer (PMUT);    differential excitation;    transmitting sensitivity;    receiving sensitivity;   

DOI  :  10.3390/proceedings2130925

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.

【 授权许可】

CC BY