A Micromechanical Binary Counter with MEMS-Based Digital-to-Analog Converter

Proceedings

Hoffmann, Martin¹  Schmitt, Philip²  Mehner, Hannes³ 

[1] Author to whom correspondence should be addressed.;Chair for Microsystems Technology, Ruhr-Universität Bochum, 44801 Bochum, Germany;X-Fab MEMS Foundry GmbH, 99097 Erfurt, Germany

关键词: passive microsystem;    mechanical digital-to-analog converter;    binary counter;    passive sensor;    MEMS-mechanism;    MEMS;    MEMS-DAC;   

DOI  :  10.3390/proceedings2130807

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Autonomous sensors are of interest in all cases where a continuous power source is not available or difficult to realize. Besides harvesting of electrical energy for a complex storage system, it is of interest to directly store an event in a non-electrical storage, but in a way that allows a later electrical read-out. Therefore, a miniaturized micromechanical binary counter is presented, which enables counting of threshold events, such as exceeding temperature limits or high mechanical shocks. An electro-mechanical digital-to-analog converter integrated in the binary counter is demonstrated as an option for monolithic electrical read-out of the mechanically stored information.

【 授权许可】

CC BY