Detection of Heart and Respiration Rate with an Organic-Semiconductor-Based Optomechanical MEMS Sensor

Proceedings

Meng, Hsin-Fei¹  Kainz, Andreas²  Hortschitz, Wilfried³  Zan, Hsiao-Wen⁴  Hammer, Günter⁵  Sauter, Thilo⁶ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan;Institute of Physics, National Chiao Tung University, Hsinchu 300, Taiwan;Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: MEMS;    biosensors;    organic semiconductors;    heart rate;    respiration rate;   

DOI  :  10.3390/proceedings2130715

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present a displacement-sensitive sensor comprising a microelectromechanical (MEMS) chip and organic optoelectronic components capable of measuring the heart and respiration rate on humans. The MEMS sensor relies on the inertial deflection of a small silicon oscillator. The readout of the deflection is optical and works via modulation of the light flux passing through the MEMS. Organic optoelectronics are used as light source and detector, since these offer a homogeneous light distribution and a more compact package in a future integration. Two types of MEMS, differing in their resonance frequency, were designed and characterised in combination with both organic and inorganic optoelectronics prior to measuring heart and respiration rate. Subsequently, by measurements on the neck, pulse and respiration rate were successfully measured.

【 授权许可】

CC BY