Reduced Order Component & System Level Modelling for Fluid-Solid Interactions in Complex MEMS Devices

Proceedings

Kriebel, David¹  Schmidt, Henry²  Mehner, Jan³ 

[1] Author to whom correspondence should be addressed.;Department of Microsystems and Biomedical Engineering, Chemnitz University of Technology, 09126 Chemnitz, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: MEMS;    sensors;    actuators;    simulation;    reduced order modelling;    fluidic damping;    modal superposition;    component mode synthesis;   

DOI  :  10.3390/proceedings2130937

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The time-efficient and accurate implementation of physics-based fluidic damping effects is still one of the biggest challenges in the simulation of complex MEMS devices. Two modelling approaches utilizing the CRAIG/BAMPTON component mode synthesis method are discussed and compared in context of a highly automated model generation procedure. The first approach uses a modal projection technique with pressure profiles obtained from REYNOLDS flow simulations using the thermal-fluidic analogy. The second approach is based on the representation of the fluidic domain in form of a generalized KIRCHHOFFian lumped flow resistance network model. Both methods are generally suited for the simulation of structures like gyroscopes or accelerometers, but show different behaviors in terms of scaling and complexity during the model generation step and in the final ROM. The methods are demonstrated on examples and are compared to optical measurements of an out-of-plane teeter-totter type accelerometer.

【 授权许可】

CC BY