Novel MEMS Sensor for Detecting Magnetic Particles in Liquids

Proceedings

Schlögl, Matthias¹  Schneider, Michael²  Patocka, Florian³  Schmid, Ulrich⁴ 

[1] Austrian Excellence Center for Tribology, AC2T Research GmbH, 2700 Wr. Neustadt, Austria;Author to whom correspondence should be addressed.;Institute of Sensor- and Actuator Systems, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: MEMS sensor;    microcantilever;    magnetic particles;    resonant mass sensing;   

DOI  :  10.3390/proceedings2130868

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present a novel MEMS sensor for the detection of magnetic particles in liquids, which consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar coil on its free end. Due to the latter component, magnetic particles are attracted and accumulate on the sensor surface. The additional mass introduced by the particles changes the resonance frequency of the microcantilever serving as measured quantity. To evaluate our design, we dispersed 250 nm iron-oxide particles in de-ionized water and monitored the resonance frequency during particle accumulation. 100 min after measurement start, a total resonance frequency shift of 6 kHz was found, which can easily be measured and shows the high potential of the proposed sensor design.

【 授权许可】

CC BY