Elasticity Constants of a Two-Phase Tungsten Thin Film

Proceedings

Alhussein, Akram¹  Slim, Mohamed Fares²  François, Manuel³ 

[1] Author to whom correspondence should be addressed.;ICD-LASMIS, Université de Technologie de Troyes, 10000 Troyes, France;Presented at the 18th International Conference on Experimental Mechanics, Brussels, Belgium, 1–5 July 2018.

关键词: Young’s modulus;    shear modulus;    poisson’s ratio;    dynamical resonant method;    IET;    coatings;    magnetron sputtering;    uncertainty;    tungsten;   

DOI  :  10.3390/ICEM18-05272

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The IET was used to determine the macroscopic elasticity constants of the multiphase coating. In order to determine the macroscopic elasticity constants of the film firstly, a critical assessment of Young’s modulus determination was done by comparing all the models proposed in the literature. The best model was identified and a study was performed to identify and quantify the most influent factors on the global uncertainty. Secondly, an enhanced formulation to determine the shear modulus of coating by IET was developed. The methodology was applied on a tungsten thin film deposited by DC magnetron sputtering.

【 授权许可】

CC BY