Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

Proceedings

Koppitsch, Günther¹  Nevlacsil, Stefan²  MaeseNovo, Alejandro³  Muellner, Paul⁴  Sagmeister, Martin⁵ 

[1] AIT Austrian Institute of Technology GmbH, 1210 Vienna, Austria;Author to whom correspondence should be addressed.;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;Research Centre for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, Austria;ams AG, 8141 Premstaetten, Austria

关键词: optical waveguides;    Si3N4 waveguides;    photonics;    OCT;    AWG;   

DOI  :  10.3390/proceedings2131023

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

As a leading provider of sensing solutions ams AG is developing semiconductor sensors in a wide variety of fields. One of the key competences of ams AG lies in optical sensing. To widen the company’s portfolio in this field we have been developing processes for fully integrated CMOS compatible photonic components based on Si3N4 in the last few years. This contribution will give an overview of the Si3N4 process as a post-processing flow for standard CMOS, some basic photonic building blocks and their properties, and an example for their use in the field of medical applications.

【 授权许可】

CC BY