期刊论文详细信息
Beilstein Journal of Nanotechnology
Towards the third dimension in direct electron beam writing of silver
关键词: carboxylate;    electron beam induced deposition;    silver;    three-dimensional nanostructures;    vertical growth rate;   
DOI  :  10.3762/bjnano.9.78
学科分类:地球科学(综合)
来源: Beilstein - Institut zur Foerderung der Chemischen Wissenschaften
PDF
【 摘 要 】

Carboxylates constitute an extremely promising class of precursor compounds for the electron beam induced deposition of silver. In this work both silver 2,2-dimethylbutyrate and silver pentafluoropropionate were investigated with respect to their dwell-time-dependent deposition behavior and growth characteristics. While silver 2,2-dimethylbutyrate showed a strong depletion in the center of the impinging electron beam profile hindering any vertical growth, silver pentafluoropropionate indicated a pronounced dependency of the deposit height on the dwell time. Truly three-dimensional silver structures could be realized with silver pentafluoropropionate. The pillars were polycrystalline with silver contents of more than 50 atom % and exhibit strong Raman enhancement. This constitutes a promising route towards the direct electron beam writing of three-dimensional plasmonic device parts from the gas phase.

【 授权许可】

CC BY   

【 预 览 】
附件列表
Files Size Format View
RO201902197514139ZK.pdf 2825KB PDF download
  文献评价指标  
  下载次数:4次 浏览次数:15次