Bias voltage influence on the mechanical and tribological properties of titaniumaluminum nitride coatings produced by triode magnetron sputtering

Materia

Parra, Elisabeth Restrepo¹  Restrepo, Juan Manuel Velez²  Narvaez, Diana Marcela Devia³ 

[1] Universidad Nacional de Colombia Sede Manizales, Colombia;Universidad Nacional de Colombia Sede Medell'n, Colombia;Universidad Tecnol-gica de Pereira, Pereira, Colombia

关键词: Bias voltage;    Coefficient of friction;    Adhesion;    Hardness.;   

DOI  :  10.1590/S1517-707620150001.0013

学科分类：工程和技术（综合）

来源: Universidade Federal do Rio de Janeiro * Coordenacao dos Programas de Pos-Graduacao de Engenharia

【 摘 要 】

TixAl1-xN coatings were grown using the triode magnetron sputtering technique with various bias voltages between -40 V and -150 V. As the bias voltage increased, an increase in the Al atomic percentage was observed, presenting a competition with Ti and producing structural changes. Moreover, the grain size and roughness were also strongly influenced by the bias voltage. It was observed that coatings with concentrations of approximately 25% Al and 75% Ti exhibited an optimum mixture of mechanical and tribological properties. The average coefÞcient of friction was low for the TiAlN coating that was grown at -40 V. Additionally, the critical load was obtained by measuring the adhesion using the scratch test.

【 授权许可】

CC BY