Monolithic integrated MEMS phased array antenna scanning in two dimensions

IEICE Electronics Express

Fu Bo¹  Liu Dong¹  Xu Lixin²  Cong Lin²  Han Qi² 

[1] MEMS Research Center, Huaihai Industrial Group Co., Ltd.;School of Mechatronical Engineering, Beijing Institute of Technology

关键词: monolithic integrated;    MEMS phase shifters;    MEMS switches;    microstrip antenna;    phased array antennas;    reconfigurable antennas;   

DOI  :  10.1587/elex.14.20170484

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

A two-dimension scanning of phased array antenna has been presented. Aperture coupled microstrip patch antenna (ACMPA) elements are used to form a 2 × 2 array operating at 20 GHz. The array is monolithically fabricated with RF MEMS switches by using surface micromachining and anodic bonding process. The main beam can steer in two dimensions when the phase shifters are on the different state. The measurement results show that the array can complete a beam steering angle of approximate ±30° in both E-plane and H-plane, and the highest gain is 9.5 dB.

【 授权许可】

CC BY