Experimental Study of an Aluminum-Polysilicon Thermopile for Implementation of Airflow Sensor on Silicon Chip

Journal of Engineering and Technological Sciences

Ayub Subandi¹  Adang Suwandi Ahmad²  Irman Idris² 

[1]Microelectronic Center, ITB, Jl. Ganesha No.10, Bandung 40132

[2]Microelectronic Center, ITB, Jl. Ganesha No.10, Bandung 40132.School of Electrical Engineering and Informatics, ITB, Jl. Ganesha No.10, Bandung 40132

DOI  :  10.5614/itbj.eng.sci.2007.39.2.2

学科分类：工程和技术（综合）

来源: Institute for Research and Community Services ITB

【 授权许可】

CC BY