Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications

Proceedings

Behlert, Regine¹ 

关键词: piezoelectricity;    fluidic actuator;    laser doppler vibrometry;    thin-film technology;   

DOI  :  10.3390/proceedings1040372

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV).

【 授权许可】

CC BY