Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films

Proceedings

Fischeneder, Martin¹ 

关键词: Q-factor;    MEMS cantilever;    AlN;    piezoelectric;    phase shifted excitation;    AFM;    vacuum;   

DOI  :  10.3390/proceedings1040380

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

When targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local resolution. To achieve this goal, an additional stimulus is applied to the cantilever with respect to the mechanical stimulus provided by the macroscopic piezoelectric actuator. This additional stimulus is generated by an aluminium nitride based piezoelectric actuator integrated on the cantilever, which is driven by a phase shifted excitation. With this approach, the mechanical Q-factor measured with a laser Doppler vibrometer (LDV) in vacuum is electrically decreased by a factor of up to 1.7.

【 授权许可】

CC BY