Enhanced Characteristics of Nondispersive Infrared CO2 Gas Sensor by Deposition of Hydrophobic Thin Film

Proceedings

Kim, Jinho¹ 

关键词: hydrophobic film;    NDIR gas sensor;    carbon dioxide gas sensor;    White-cell structure;    IR absorbance;    temperature compensation;   

DOI  :  10.3390/proceedings1040410

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper presents the NDIR CO2 gas sensor that has improved the sensitivity and also the accuracy by the deposition of thin hydrophobic film (Parylene-C film with 0.5 micrometer thick) onto the reflector surfaces of White-cell structure. After deposition of hydrophobic thin film, the sensitivity of sensor has been increased with averaged 10% and the estimated errors were reduced within 13 ppm to 143 ppm from 254 K to 324 K temperature ranges and from 0 ppm to 5000 ppm CO2 concentrations.

【 授权许可】

CC BY