Diamond Coated LW-SAW Sensors-Study of Diamond Thickness Effect

Proceedings

Drbohlavová, L.¹ 

关键词: Love waves;    acoustic sensors;    CVD diamond;    sensing in liquids;   

DOI  :  10.3390/proceedings1040540

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This study focuses on the fabrication and characterization of Love wave surface acoustic wave (LW-SAW) sensors with a thin nano-crystalline diamond (NCD) coating with an integrated microfluidics system. The effect of diamond layer thickness on the acoustic wave phase velocity and the sensor’s sensitivity have been investigated experimentally and compared with theoretical simulations. The fabricated sensors have been tested with a several liquids using a home-made microfluidics system.

【 授权许可】

CC BY