Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode

Proceedings

Medina, Lior¹ 

关键词: curved micro beam;    electrostatic actuation;    dynamic release;    bistability;    MEMS/NEMS;   

DOI  :  10.3390/proceedings1040277

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.

【 授权许可】

CC BY