Proceedings | |
Two-Directional Operation of Bistable Latchable Micro Switch Actuated by a Single Electrode | |
Medina, Lior1  | |
关键词: curved micro beam; electrostatic actuation; dynamic release; bistability; MEMS/NEMS; | |
DOI : 10.3390/proceedings1040277 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
Curved micromechanical beams are a versatile platform for exploring multistable behavior, with potential applications in mechanical based logic elements and electrical and optical switches. Here we demonstrate bidirectional electrostatic actuation of a bistable, latched, micromechanical beam by the same electrode, which was used for the snap-through switching of the device. The release of the mechanically-latched beam is achieved by pre-loading the structure using a rising voltage applied to the electrode, followed by a sudden decrease of the voltage. This abrupt removal of the loading results in a transient response and dynamic snap-back of the beam.
【 授权许可】
CC BY
【 预 览 】
Files | Size | Format | View |
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RO201902025793108ZK.pdf | 537KB | download |