An Electromagnetically-Driven Piezoresistively Sensed CMOS MEMS Scanning Mirror for Projection Display

Proceedings

Li, Zhong-He¹ 

关键词: CMOS MEMS;    electromagnetic actuation;    piezoresistive sensor;   

DOI  :  10.3390/proceedings1040353

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Bi-axial MEMS scanning mirrors are considered the key component for applications like laser scanning projectors and Lidars. Most studies have shown fabricated devices driven by open-loop operation without sensing, making it difficult to meet the requirements for practical applications. To facilitate bi-axial closed-loop operation, this work presents an electro magnetically-driven scanning mirror with piezoresistive sensing conveniently implemented in a CMOS (complementary metal oxide semiconductor) process. The measured resonant frequencies with respect to the slow and fast axes are 4.3 and 36.05 kHz, respectively, with the aim to provide SXGA display resolution.

【 授权许可】

CC BY