A Combined Temperature and Stress Sensor in 0.18 μm CMOS Technology

Proceedings

Huber, Samuel¹ 

关键词: temperature sensor;    stress sensor;    cross-sensitivity;    multisensor system;   

DOI  :  10.3390/proceedings1040340

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper presents a solution for on-chip temperature and mechanical stress measurement in CMOS integrated circuits. Thereby both temperature and stress sensors are realized as resistive Wheatstone bridges. By design, both sensors show outputs affected by non-linearities and parasitic cross-sensitivities. The novelty presented in this work is to combine both non-ideal sensor outputs by applying a two-dimensional Newton-Raphson method to extract the actual values of temperature and mechanical stress which were obtained with errors of less than 0.5 K and 0.5 MPa.

【 授权许可】

CC BY