Proceedings | |
MEMS Inertial Switch for Military Applications | |
Lee, Hyo-Nam1  | |
关键词: MEMS inertial switch; ignition system; mass-spring system; | |
DOI : 10.3390/proceedings1040343 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
We developed a MEMS inertial switch (hereafter, the switch) for an ignition system of missiles. The developed switch consists of four folded beams and a plate suspended by the beams, analogous to a well-known spring-mass system. The plate and four beams compose a single body, which is made from single crystalline silicon wafers by deep reactive ion etching techniques. This process gives high thermal stability and stress-free structure. The switching, either open or close a conductive path, is achieved by the movement of the plate suspended with four folded beams when the acceleration exceeds a predetermined threshold. With a spinning-rate table, the function of the switch was tested at various revolution speeds. The test results are compared with the calculation results by our analytical model.
【 授权许可】
CC BY
【 预 览 】
Files | Size | Format | View |
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RO201902022862872ZK.pdf | 1053KB | download |