Fabrication of Al microtubes by electromigration and controlled etching

The Journal of Engineering

Yebo Lu¹  Wenli Peng¹  Chuhui Liu² 

[1] College of Mechanical and Electrical Engineering, Jiaxing University, Jiaxing 314001, People's Republic of China

关键词: etching;    discharge holes;    current supply duration;    thin films;    Al;    hollow microtube;    anode;    microwire;    electromigration;    metallic microtubes;   

DOI  :  10.1049/joe.2016.0162

学科分类：工程和技术（综合）

来源: IET

【 摘 要 】

Al microtubes were fabricated by electromigration and controlled etching. Samples consisted of thin Al films with slits and discharge holes near the anode. Al atoms accumulated and discharged forming a microwire, which was then etched into a hollow microtube. Al microtubes could be fabricated at predetermined positions, with their lengths dependent on the current supply duration. The outer and inner diameters of the Al microtube could be determined by controlling the size of the etched hole. This technique has potential in the fabrication of other metallic microtubes.

【 授权许可】

CC BY