Uniform Fabrication of Moems Arrays Using Dry Thick Resist Films

Proceedings

Camps, Thierry¹ 

关键词: MOEMS;    micro-optics;    dry thick resist film;    SU-8;    wafer-scale fabrication;    VCSELs;    dynamic beam shaping;   

DOI  :  10.3390/proceedings1040551

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This study aims at focusing a laser beam at the center of a microfluidic channel for optical bio-sensing applications thanks to the collective integration of tunable microlens arrays on VCSELs devices. High aspect-ratio polymer-based MOEMS are successfully fabricated on small-sized samples using thick dry photoresist films. Such dry films are easier to use and less expensive than standard thick SU-8 and can be efficiently stacked on fragile GaAs samples using a soft-thermal-printing technique. By combining double UV exposure and planar metallization, uniform fabrication of MOEMS arrays is enabled and fabricated devices exhibit reproducible electro-thermal behavior.

【 授权许可】

CC BY