SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks

ETRI Journal

关键词: NO2gas sensing;    ZnO nanorods;    micro-hotplate;    USN;    SOI CMOS-based gas sensor platform technology;   

Others  :  1185654
DOI  :  10.4218/etrij.08.0108.0101

【 摘 要 】

This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200C and showed a good response to 100 ppb NO2 gas.

   

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