Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors

ETRI Journal

关键词: plastic substrate;    OTFT;    pentacene;    PCOVD;   

Others  :  1186276
DOI  :  10.4218/etrij.12.0212.0266

【 摘 要 】

In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are 0.1 cm²/Vs and 10⁶, respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.

   

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