Modeling the distribution of temperature field within the micro heat-loss anemometer based on silicon carbide

International Scientific and Practical Conference on Innovations in Engineering and Technology

工业技术;自然科学

Evstigneev, D.A.^1 ; Karachinov, V.A.^1 ; Varshavskiy, A.S.^1 ; Manykhin, V.A.^1

Division of Microelectronics, Novgorod State University, ul. B. St. Petersburgskaya, 41, Veliky Novgorod

173003, Russia^1

关键词: Distribution of temperature;    Thermal characteristics;    Thermal influence;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/441/1/012016/pdf
DOI  :  10.1088/1757-899X/441/1/012016

来源: IOP

【 摘 要 】

The results of modeling the thermal characteristics of microsystems are presented and mutual thermal influence of the elements depending on the type of construction has been evaluated.