The experimental study of spacial distribution of particles produced in the pulse arc discharge

25th International Conference on Vacuum Technique and Technology

Goncharov, V.D.^1 ; Yashkardin, R.V.^1

St. Petersburg Electrotechnical Univeristy (ETU), Saint Petersburg

197376, Russia^1

关键词: Distribution of particles;    Energy impact;    Experimental research;    Motion Vectors;    Particles distribution;    Pulse arc discharge;    Pulse discharge plasmas;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012021/pdf
DOI  :  10.1088/1757-899X/387/1/012021

来源: IOP

【 摘 要 】

The results of experimental researches of special particle psuttering produced due to the energy impact of the pulse discharge plasma moving along the surface of the extended electrodes. The particles distribution study of the substrates placed at the different areas regarding the dis-charge was carried out using scanning probe microscope. It is shown that the major part of the produced particles had sizes from 50 to 500 nm and sputtered orthogonally to the surface of the electrodes and discharge motion vector.