Investigation of a small-sized source parameters for magnetron sputtering with liquid-phase target

25th International Conference on Vacuum Technique and Technology

Khramova, A.A.^1 ; Matanin, A.R.^1 ; Polin, D.A.^1 ; Vasil'Ev, D.D.^1 ; Moiseev, K.M.^1

Bauman Moscow State Technical University, Moscow

105005, Russia^1

关键词: Discharge power;    Liquid Phase;    Source parameters;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012033/pdf
DOI  :  10.1088/1757-899X/387/1/012033

来源: IOP

【 摘 要 】

The article describes an investigation of a small-sized source called NMSA-52M for magnetron sputtering with liquid-phase target. Causes and features affecting the discharge power required for the target melting are considered. Methods of increasing the discharge power of a given source are proposed. The design of the crucible reducing the intensity of the heat sink is given.