Study of nanoscale metal oxide coatings produced by magnetron sputtering of copper followed by heat treatment

25th International Conference on Vacuum Technique and Technology

Kashkul, I.N.^1 ; Bakhchova, L.D.^1 ; Elanskaia, K.G.^1 ; Redka, D.N.^1

Saint-Petersburg State Electrotechnical University LETI, St. Petersburg

197376, Russia^1

关键词: Heat treatment conditions;    Nanoscale metals;    Oxide phasis;    P type conductivity;    Quartz glass;    Rf-sputtering;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012030/pdf
DOI  :  10.1088/1757-899X/387/1/012030

来源: IOP

【 摘 要 】

The composition and microstructure of nanoscale metal oxide coatings deposited by magnetron RF sputtering copper on the quartz glass with followed heat treatment were investigated. The dependence of the film thickness and the content of oxides CuO and Cu2O in it depending on the temperature and time of heat treatment conditions were obtained. Studies have shown that, depending on the mode of receipt of copper oxide films may be multiphasic and include various oxide phases, predominantly, CuO and Cu2O with different bandgap and p-type conductivity.