Research of acoustically stimulated thermal desorption in electrovacuum microwave devices

25th International Conference on Vacuum Technique and Technology

Khanbekov, I.F.^1,2 ; Li, I.P.^1 ; Petrov, V.S.^1 ; Mikhaylov, V.P.^2 ; Deulin, E.A.^2

JSC Pluton, Moscow

105120, Russia^1

Bauman Moscow State University, Moscow

105005, Russia^2

关键词: Acoustic effects;    Electric devices;    Electrovacuum;    Gas component;    Gas desorption;    Gas release;    Internal surfaces;    Thermoacoustic;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012032/pdf
DOI  :  10.1088/1757-899X/387/1/012032

来源: IOP

【 摘 要 】

The article describes the results of the research of gas desorption from internal surfaces and from the thickness of metal and non-metal parts of electrovacuum microwave devices into free gas due to the simultaneous thermal and acoustic effects on the device body. There are adduced the comparison of the rate of gas release at different technologies of electric devices pumping. Also, it's given the physical explanation of the mechanism of thermoacoustic desorption of gas components in a vacuum. Also, it's given the physical explanation of the mechanism of thermoacoustic desorption of gas components in a vacuum.