System of vacuum mechanisms failure prediction based on outgassing flows dynamic

25th International Conference on Vacuum Technique and Technology

Deulin, E.A.^1 ; Mikhailov, V.P.^1 ; Emelianenko, R.O.^1

Bauman Moscow State Technical University, Moscow

105005, Russia^1

关键词: Dynamic pressures;    Dynamic property;    Failure prediction;    Flow oscillations;    Impact frequency;    Residual pressures;    Time to failure;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012016/pdf
DOI  :  10.1088/1757-899X/387/1/012016

来源: IOP

【 摘 要 】

We simulated a vacuum system in order to diagnose vacuum mechanism failure with the goal of estimating dynamic properties of pumps (time to achieving desired pressure in the presence of rapidly varying flows, precision of dynamic pressure maintenance), determining maximum recordable impact frequency of rectangular gas flow pulses when detecting the mechanism state and predicting time to failure. The following parameters are usable for diagnostics: frequency and magnitude of outgassing flow oscillations in the mechanism, residual pressure fluctuations in the vacuum chamber.