Study on error averaging effects of aerostatic bearing considering rough surface profile

2018 International Conference on Advanced Materials, Intelligent Manufacturing and Automation

材料科学;机械制造;运输工程

Zhao, Xiao-Long^1 ; Dong, Hao^1 ; Zhang, Jun-An^1

School of Mechatronic Engineering, Xi'An Technological University, Xi'an Shaanxi

710021, China^1

关键词: Aerostatic bearings;    Averaging effect;    Calculation results;    Comparative data;    Control equations;    Dynamic equilibrium equation;    Gas lubrication;    Theoretical modeling;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/382/4/042054/pdf
DOI  :  10.1088/1757-899X/382/4/042054

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

In order to investigate the influence of the error averaging effects of aerostatic bearing, this paper studies the error averaging model of rough surface profile. According to the theoretical model of the aerostatic bearing, the dynamic equilibrium equation of the aerostatic bearing is established under the given theory of rough profile; based on gas lubrication theory, deduced the gas lubrication control equation of the aerostatic bearing; get the comparative data of error averaging effects of aerostatic bearing in gas lubrication and direct contact were calculated respectively. The calculation results show that the error averaging effects of gas lubrication is improved by 40% compared with the profile error in direct contact. The analysis of the factors affecting error homogenizing effect shows that: the wavelength of the profile error is the main factor, the smaller the wavelength λ is, the stronger the error averaging effects is. In addition, the error averaging effects of the gas lubrication error is almost not affected by the weight of the aerostatic bearing and the pressure of the air supply when aerostatic bearing is separated from the guide plate.