Synthesis of diamond-like hydrocarbon films by atmospheric pressure filamentary dielectric barrier discharge

2018 5th Global Conference on Polymer and Composite Materials

材料科学;化学

Suzuki, T.^1 ; Shirakura, A.^1

Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Yokohama

223-8522, Japan^1

关键词: Atmospheric pressure plasmas;    Diamond-like;    Dielectric discharges;    Filamentary dielectric barrier discharges;    Glow dielectric barrier discharge;    Hydrocarbon films;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/369/1/012046/pdf
DOI  :  10.1088/1757-899X/369/1/012046

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.