Design and Optimization of AlN based RF MEMS Switches

International Conference on Smart Engineering Materials 2018

Hasan Ziko, Mehadi^1 ; Koel, Ants^1

Department of Electronics, Tallinn University of Technology, Estonia^1

关键词: Design and optimization;    Finite element modelling;    Low actuation voltage;    Optimized geometries;    Piezoelectric actuation;    Radio frequency microelectromechanical systems;    Semiconductor technology;    Switch technologies;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/362/1/012002/pdf
DOI  :  10.1088/1757-899X/362/1/012002

来源: IOP

【 摘 要 】

Radio frequency microelectromechanical system (RF MEMS) switch technology might have potential to replace the semiconductor technology in future communication systems as well as communication satellites, wireless and mobile phones. This study is to explore the possibilities of RF MEMS switch design and optimization with aluminium nitride (AlN) thin film as the piezoelectric actuation material. Achieving low actuation voltage and high contact force with optimal geometry using the principle of piezoelectric effect is the main motivation for this research. Analytical and numerical modelling of single beam type RF MEMS switch used to analyse the design parameters and optimize them for the minimum actuation voltage and high contact force. An analytical model using isotropic AlN material properties used to obtain the optimal parameters. The optimized geometry of the device length, width and thickness are 2000 μm, 500 μm and 0.6 μm respectively obtained for the single beam RF MEMS switch. Low actuation voltage and high contact force with optimal geometry are less than 2 Vand 100 μN obtained by analytical analysis. Additionally, the single beam RF MEMS switch are optimized and validated by comparing the analytical and finite element modelling (FEM) analysis.