The morphological study of porous silicon formed by electrochemical anodization method

International Conference on Advanced Materials for Better Future 2017

Suryana, R.^1 ; Sandi, D.K.^2 ; Nakatsuka, O.^3

Department of Physics, Faculty of Mathematics and Sciences, Sebelas Maret University, Indonesia^1

College of Engineering, Graduate Institute of Energy Engineering, National Central University, Taiwan^2

Department of Materials Physics, Graduate School of Engineering, Nagoya University, Japan^3

关键词: Anodization time;    Electro-chemical anodization;    Electrolyte solutions;    Morphological study;    Physical and chemical properties;    Si(100) surface;    The scanning electron microscopes (SEM);    Volume ratio;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/333/1/012034/pdf
DOI  :  10.1088/1757-899X/333/1/012034

来源: IOP

【 摘 要 】

Due to its good physical and chemical properties, porous silicon (PSi) is very attractive to study. In this research, PSi has been fabricated on n-type Si (100) by the electrochemical anodization method. The electrolyte solution used was a mixture of HF (40%), ethanol (99%) and aquadest with volume ratio of 1:1:2, respectively. It was anodized on Si(100) surface at different current densities of 10 mA/cm2and 20 mA/cm2with the anodization time at each current density for 10 min, 20 min, and 30 min. The Scanning Electron Microscope (SEM) images showed that the PSi surfaces have inhomogeneous sized pores in the range of 95.00 nm-1.46 μm. The PSi layers with current density and anodization time of 10 mA/cm2(10 min), 10mA/cm2(20 min), and 20mA/cm2(10 min) have spherical shaped pores while the others have some uncommon (cross sectional) shaped pores on surfaces. It is considered that the cross sectional shaped maybe caused by unstable the current during the electrochemical anodization process.