Morphology and Structural Characterization of Carbon Nanowalls Grown via VHF-PECVD

Malaysian Technical Universities Conference on Engineering and Technology 2017

Akmal Hasanudin, M.^1 ; Wahab, Y.^1 ; Ismail, A.K.^2 ; Zahid Jamal, Z.A.^1

Advanced Multidisciplinary MEMS-Based Integrated Electronic NCER Centre of Excellence (AMBIENCE), School of Microelectronic Engineering, Universiti Malaysia Perlis, Kuala Perlis, Perlis

02000, Malaysia^1

Department of Physics, Faculty of Science, Universiti Teknologi Malaysia, Skudai, Johor

43010, Malaysia^2

关键词: Carbon Nanostructures;    Carbon nanowalls (CNW);    Electrode spacing;    Hydrocarbon radicals;    Nanocrystalline graphite;    Narrow bandwidth;    Structural characterization;    Very high frequency plasma enhanced chemical vapor deposition;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/318/1/012043/pdf
DOI  :  10.1088/1757-899X/318/1/012043

来源: IOP

【 摘 要 】

A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of methane and hydrogen. Morphology and structural properties of the grown nanostructure were investigated by FESEM imaging and Raman spectroscopy. Carbon nanowalls (CNW) with dense and wavy-like structure were successfully synthesized. The wavy-like morphology of CNW was found to be more distinct during growth at small electrode spacing and denser with increasing deposition time due to better flux of hydrocarbon radicals to the substrate and higher rate of reaction, respectively. Typical characteristics of CNW were observed from strong D band, narrow bandwidth of G band and single broad peak of 2D band of Raman spectra indicating the presence of disordered nanocrystalline graphite structure with high degree of graphitization.