Fabrication of an ordered mesoporous nanoparticle SiO2/Mc and their CMP of fused silica application

International Conference on Mechanical Engineering and Applied Composite Materials

机械制造;材料科学

Xu, L.^1,2,3 ; Zou, C.L.^1,2,3 ; Zhang, X.^1 ; Kang, C.X.^1 ; Luo, G.H.^2,3 ; Pan, G.S.^1,2,3

State Key Laboratory of Tribology, Tsinghua University, Beijing, China^1

Research Institute of Tsinghua University in Shenzhen, Shenzhen, China^2

Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen, China^3

关键词: Colloidal silica;    Composite abrasives;    Dispersibilities;    Nano-composite particle;    Ordered mesoporous;    Scanning electronic microscopes;    Silica surface;    Topographical variations;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/307/1/012028/pdf
DOI  :  10.1088/1757-899X/307/1/012028

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Here we developed an inorganic SiO2core/mesoporous carbon shell structured (SiO2/Mc) nano-composite particle with an average size ∼50 nm as abrasives with improved dispersibility and distribution via a hydro-thermal route to obtain reserved fused silica surface and subsurface. The obtained SiO2/Mc were characterized by scanning electronic microscope. Atomic force microscopy was used to assess the surface before and after planarization. The results indicated the as-prepared SiO2/Mc composite abrasives gave a much lower surface roughness as well as lower topographical variations than that of traditional colloidal silica abrasives.