Design and simulation analysis of a novel pressure sensor based on graphene film

International Conference on Mechanical Engineering and Applied Composite Materials

机械制造;材料科学

Nie, M.^1 ; Xia, Y.H.^1 ; Guo, A.Q.^1

Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China^1

关键词: Design and simulation;    Different pressures;    Displacement distribution;    Fabrication process;    Measurement range;    Mechanical stress;    Optimized structures;    Sensor structures;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/307/1/012004/pdf
DOI  :  10.1088/1757-899X/307/1/012004

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

A novel pressure sensor structure based on graphene film as the sensitive membrane was proposed in this paper, which solved the problem to measure low and minor pressure with high sensitivity. Moreover, the fabrication process was designed which can be compatible with CMOS IC fabrication technology. Finite element analysis has been used to simulate the displacement distribution of the thin movable graphene film of the designed pressure sensor under the different pressures with different dimensions. From the simulation results, the optimized structure has been obtained which can be applied in the low measurement range from 10hPa to 60hPa. The length and thickness of the graphene film could be designed as 100μm and 0.2μm, respectively. The maximum mechanical stress on the edge of the sensitive membrane was 1.84kPa, which was far below the breaking strength of the silicon nitride and graphene film.