International Conference on Mechanical Engineering and Applied Composite Materials | |
Dry aerosol jet printing of conductive silver lines on a heated silicon substrate | |
机械制造;材料科学 | |
Efimov, A.A.^1 ; Arsenov, P.V.^1 ; Protas, N.V.^1 ; Minkov, K.N.^2 ; Urazov, M.N.^1 ; Ivanov, V.V.^1 | |
Department of Physical and Quantum Electronics, Moscow Institute of Physics and Technology, Dolgoprudny | |
141700, Russia^1 | |
Moscow Institute of Electronics and Mathematics, National Research University of Higher School of Economics, Moscow, Russia^2 | |
关键词: Aerosol jet printings; Conductive lines; Heated substrates; Heating plates; Silicon substrates; Spark discharge; | |
Others : https://iopscience.iop.org/article/10.1088/1757-899X/307/1/012082/pdf DOI : 10.1088/1757-899X/307/1/012082 |
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学科分类:材料科学(综合) | |
来源: IOP | |
【 摘 要 】
A new method for dry aerosol jet printing conductive lines on a heated substrate is presented. The method is based on the use of a spark discharge generator as a source of dry nanoparticles and a heating plate for their sintering. This method allows creating conductive silver lines on a heated silicon substrate up to 300 °C without an additional sintering step. It was found that for effective sintering lines of silver nanoparticles the temperature of the heated substrate should be about more than 200-250 °C. Average thickness of the sintered silver lines was equal to ∼20 μm. Printed lines showed electrical resistivity equal to 35 μΩ•cm, which is 23 times greater than the resistivity of bulk silver.
【 预 览 】
Files | Size | Format | View |
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Dry aerosol jet printing of conductive silver lines on a heated silicon substrate | 407KB | download |