Dry aerosol jet printing of conductive silver lines on a heated silicon substrate

International Conference on Mechanical Engineering and Applied Composite Materials

机械制造;材料科学

Efimov, A.A.^1 ; Arsenov, P.V.^1 ; Protas, N.V.^1 ; Minkov, K.N.^2 ; Urazov, M.N.^1 ; Ivanov, V.V.^1

Department of Physical and Quantum Electronics, Moscow Institute of Physics and Technology, Dolgoprudny

141700, Russia^1

Moscow Institute of Electronics and Mathematics, National Research University of Higher School of Economics, Moscow, Russia^2

关键词: Aerosol jet printings;    Conductive lines;    Heated substrates;    Heating plates;    Silicon substrates;    Spark discharge;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/307/1/012082/pdf
DOI  :  10.1088/1757-899X/307/1/012082

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

A new method for dry aerosol jet printing conductive lines on a heated substrate is presented. The method is based on the use of a spark discharge generator as a source of dry nanoparticles and a heating plate for their sintering. This method allows creating conductive silver lines on a heated silicon substrate up to 300 °C without an additional sintering step. It was found that for effective sintering lines of silver nanoparticles the temperature of the heated substrate should be about more than 200-250 °C. Average thickness of the sintered silver lines was equal to ∼20 μm. Printed lines showed electrical resistivity equal to 35 μΩ•cm, which is 23 times greater than the resistivity of bulk silver.