Development of a compact FE-SEM and X-ray microscope with a carbon nanotube electron source

15th European Workshop on Modern Developments and Applications in Microbeam Analysis; 7th Meeting of the International union of Microbeam Analysis Societies

材料科学;物理学

Irita, M.^1,2 ; Yamazaki, S.^1 ; Nakahara, H.^1 ; Saito, Y.^1

Nagoya University, Department of Quantum Engineering, Nagoya

464-8603, Japan^1

Nagoya University, Venture Business Laboratory, Nagoya

464-8603, Japan^2

关键词: Accelerating voltages;    Composite fields;    Field electron emitters;    High brightness;    High-vacuum conditions;    Multi-walled CNT;    Polystyrene latex spheres;    Spatial resolution;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/304/1/012006/pdf
DOI  :  10.1088/1757-899X/304/1/012006

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

A carbon nanotube (CNT) possesses various benefits as a field electron emitter. Multi-walled CNT (MWNT) have exhibited high brightness and the field emission (FE) current is stable even under poor high-vacuum condition of 10-6- 10-7Pa without ion pumping. In this study, we have experimentally manufactured a compact composite field emission scanning electron microscope (FE-SEM) and X-ray microscope (XRM) with a single isolated MWNT electron source. An electron beam from a MWNT was focussed and accelerated by a Butler electrostatic lens. Stable SEM images were observed at a Butler voltage Vbut= 1.5 kV and accelerating voltage Vacc 15 kV with a focussed probe current Ifoc= 61 pA. The spatial resolution of the SEM, which was estimated from 80 - 20 % edge profile of polystyrene latex spheres, was about 9 nm. XRM images were acquired by 30-min exposure at Vbut= 1.5 kV and Vacc 17 kV. A spatial resolution of about 200 nm was obtained for XRM. The present results prove the high performance of the compact FE-SEM and XRM using a single isolated MWNT electron source at 10-7Pa.