Modeling of a bimetallic MEMS-based infrared detector

6th International Conference: Modern Technologies for Non-Destructive Testing

Ph Pevtsov, E.^1 ; Breev, S.V.^1 ; Demenkova, T.A.^1

Moscow Technological University (MIREA), Moscow, Russia^1

关键词: Bimetallic effects;    Microbolometer;    Prototype models;    Sensitivity characteristics;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/289/1/012022/pdf
DOI  :  10.1088/1757-899X/289/1/012022

来源: IOP

【 摘 要 】

In work techniques of calculations of the key parameters of the bimetal capacitive IR detectors matrix are presented. Sensitivity characteristics of the bimetal detector were calculated and prototype model of detector in the form of bimetallic console was produced. The possibility of use of capacitive MEMS-receivers on basis of bimetallic effect as an alternative to pyroelectric and microbolometer IR detectors is shown.