MEMS-based Optic Fiber Fabry-Perot Sensor for Underwater Acoustic Measurement with A Wavelength-switched System

1st International Workshop on Materials Science and Mechanical Engineering

材料科学;机械制造

Xia, J.^1,2 ; Wang, F.Y.^1 ; Luo, H.^1 ; Hu, Y.M.^1 ; Xiong, S.D.^1

Academy of Ocean Science and Engineering, National University of Defense Technology, Changsha

410073, China^1

College of Optics Science and Engineering, National University of Defense Technology, Changsha

410073, China^2

关键词: Acoustic measurements;    Acoustic pressures;    Acoustic Sensors;    Frequency ranges;    Intensity fluctuations;    Phase demodulation;    Test frequencies;    Wavelength-switched;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/281/1/012002/pdf
DOI  :  10.1088/1757-899X/281/1/012002

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

In this paper, a MEMS-based extrinsic Farby-Perot Interferometric (EFPI) acoustic pressure acoustic sensor is presented. The diaphragm structure is used as the second reflected surface, and the sensitive surface to acoustic pressure. A wavelength-switched phase demodulation system for EFPI sensors is used for acoustic signal recovery. The modified phase demodulation system has been demonstrated to recover the signal to a stable intensity fluctuation level of ±0.5 dB at the test frequency of 2000 Hz. In the test depth of 50cm, the sensor has a resonant frequency of 3.7 kHz, a flat frequency range of 10-800Hz, and a corresponding acoustic pressure sensitivity of -159 dB re. 1/μPa.