The Optical Dielectric Model of Cu Thin Film and Its Verification

5th Annual International Conference on Material Science and Engineering

Lai, Guozhong^1 ; Liang, Xiong^1 ; Lv, Jing^1

School of Physics and Electromechanical Engineering, Longyan University, Longyan, Fujian

364012, China^1

关键词: Cu films;    Cu target;    Cu thin film;    Dielectric modeling;    Drude-Lorentz model;    Lorentz;    Transparent substrate;    Wavelength ranges;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/275/1/012043/pdf
DOI  :  10.1088/1757-899X/275/1/012043

来源: IOP

【 摘 要 】

Cu film was deposited on transparent substrate by magnetron sputtering a Cu target. The Drude-Lorentz optical dielectric model was used to fit the measured reflectance and transmittance data in wavelength range of 300-2200nm. The optical constants, as well as the thickness of the Cu film were obtained. Moreover, the calculated optical constants and the thickness were confirmed by the TFCalc software. It was suggested that the Drude-Lorentz model is suitable for Cu film.