Investigation of Inrush Current in Nickel Microfuses

5th Asia Conference on Mechanical and Materials Engineering

机械制造;材料科学

Ketthanom, Ch^1 ; Phattanakun, R.^2

Faculty of Engineering, Department of Electrical Engineering, Vongchavalitkul University, Nakhonratchasima, Thailand^1

BL6a: Deep X-ray Lithography, Synchrotron Light Research Institute, Public Organization, Nakhonratchasima, Thailand^2

关键词: High aspect ratio micromachining;    In-rush current;    Melting current;    Melting time;    Microelectromechanical-systems technologies;    Saw-tooth;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/241/1/012033/pdf
DOI  :  10.1088/1757-899X/241/1/012033

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

This paper presents investigation of inrush current in nickel microfuses using microelectromechanical systems technology with high-aspect-ratio micromachining technology by x-ray lithography technique. The nickel microfuses were designed by the tether and saw-tooth pattern and studied the melting time, maximum melting current, maximum voltage and maximum energy consumption of the nickel microfuses in a blowing circuit. A microcontroller is used as a device to measure and collect the values of current, voltage, and energy consumption. The experimental results showed that tether fuses used melting time faster than saw-tooth fuses. But saw-tooth fuses can withstand melting current greater than tether fuses. By increasing the length of the two type fuses are ability to withstand current, power, energy consumption, and voltage are similar for the two type fuses. The I2t of inrush current is increased by the length of nickel microfuses. The length of tether 500 μm has the I2t value of inrush current a minimum at 0.0014 A2-s and the length of saw-tooth 2000 μm has the I2t value of inrush current a maximum at 0.0164 A2-s.