Development of a web-based simulator for estimating motion errors in linear motion stages

5th ModTech International Conference - Modern Technologies in Industrial Engineering

Khim, G.^1 ; Oh, J.-S.^1 ; Park, C.-H.^1

Korea Institute of Machinery and Materials, Department of Ultra Precision and Systems, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon, Korea, Republic of^1

关键词: Client software;    Design parameters;    Dominant factor;    Input parameter;    Linear motion stages;    Motion errors;    Transfer function method;    Web based simulator;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/227/1/012068/pdf
DOI  :  10.1088/1757-899X/227/1/012068

来源: IOP

【 摘 要 】

This paper presents a web-based simulator for estimating 5-DOF motion errors in the linear motion stages. The main calculation modules of the simulator are stored on the server computer. The clients uses the client software to send the input parameters to the server and receive the computed results from the server. By using the simulator, we can predict performances such as 5-DOF motion errors, bearing and table stiffness by entering the design parameters in a design step before fabricating the stages. Motion errors are calculated using the transfer function method from the rail form errors which is the most dominant factor on the motion errors. To verify the simulator, the predicted motion errors are compared to the actually measured motion errors in the linear motion stage.