Effect of annealing treatment on structure of Ag doped ZnO films deposited by thermal evaporation method

2017 Global Conference on Polymer and Composite Materials

材料科学;化学

Wang, L.N.^1,2 ; Zhou, L.^3 ; Zhou, D.^2 ; Yu, Y.^2 ; Luan, Z.Q.^2 ; Tang, D.L.^2 ; Zhu, N.^2 ; Gao, Z.H.^2 ; Liu, N.^2 ; Hu, L.Z.^1

School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian, China^1

Key Laboratory of Marine Biophysics of Liaoning Province, Dalian Ocean University, Dalian, China^2

Department of Academics, Dalian Naval Academy, Dalian, China^3

关键词: Ag doped;    Blue shift;    Effect of annealing;    Sapphire substrates;    Thermal evaporation method;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/213/1/012024/pdf
DOI  :  10.1088/1757-899X/213/1/012024

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

The Ag doped ZnO films were prepared on sapphire substrates using simple thermal evaporation method. The effect of annealing treatment was investigated in detail. The results shows that the annealed Ag doped ZnO film has a prefer orientation along c-axis. The E2(high) mode in Raman spectra has a little blue shift which caused by crystal defects oxygen vacancies, meanwhile the compressive stress was exist in the film. After annealed, the intense of E2modes have great improvement which means the quality of the film was enhanced, meanwhile, the compressive stress released to some extent.