The judgment of the All-melted-moment during using electron beam melting equipment to purify silicon

4th International Conference on Advanced Composite Materials and Manufacturing Engineering 2017

材料科学;化学

Han, Xiaojie^1 ; Meng, Jianxiong^1 ; Wang, Shuaiye^2 ; Jiang, Tonghao^2 ; Wang, Feng^2 ; Tan, Yi^1,2 ; Jiang, Dachuan^1,2

School of Materials Science and Engineering, Dalian University of Technology, Dalian

116023, China^1

DUT (Qingdao) Research Institute of New Energy Materials Technology Co. Ltd, Qingdao

266234, China^2

关键词: Cooling water temperature;    Human control;    Impurity removal;    Melting power;    Pressure and temperature;    Production process;    Quality of production;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/207/1/012059/pdf
DOI  :  10.1088/1757-899X/207/1/012059

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Experiment has proved that the rate of impurity removal depends on the pressure and the temperature of the vacuum chamber during using electron beam to smelt silicon, and the amount of removed-impurity depends on time when other conditions are the same. In the actual production process, smelting time is a decisive factor of impurity removal amount while pressure and temperature of the vacuum chamber is certain due to a certain melting power. To avoiding the influence of human control and improving the quality of production, thinking of using cooling water temperature to estimate the state of material during metal smelting is considered. We try to use the change of cooling water temperature to judge that when silicon is all melted and to evaluate the effectiveness of this method.