Characterization of Ta-B-C nanostructured hard coatings

4th International Conference on Competitive Materials and Technology Processes

Burik, J.^1 ; Buriková, V.^2 ; Souek, P.^2 ; Zábranský, L.^2 ; Vaina, P.^2

Institute of Physics of Materials, Czech Academy of Sciences, Department of Structure, Brno

CZ-61662, Czech Republic^1

Faculty of Science, Masaryk University, Department of Physical Electronics, Brno

CZ-61137, Czech Republic^2

关键词: Dc magnetron sputtering;    Deposition Parameters;    Microstructure and mechanical properties;    Microstructure observation;    Nano-crystalline layers;    Nanoindentation experiments;    Nanostructured coatings;    Scanning and transmission electron microscopy;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/175/1/012020/pdf
DOI  :  10.1088/1757-899X/175/1/012020

来源: IOP

【 摘 要 】

Microstructure and mechanical properties of Ta-B-C nanocrystalline layers prepared by magnetron sputtering were studied. DC magnetron sputtering was used to prepare thin layers on rotated substrates. Various deposition parameters were tested. Microstructure of layers was studied by means of scanning and transmission electron microscopy on thin lamellar cross sections prepared using a focussed ion beam. Both undisturbed layers and the volume under relatively large indentation prints (load of 1 N) were observed. The microstructure observations were correlated with mechanical properties characterized by means of nanoindentation experiments in both the static and the dynamic loading regime. Elastic modulus, indentation hardness and fracture resistance of prepared nanostructured coatings were evaluated and discussed.