Numerical simulation of discharge plasma generation and nitriding the metals and alloys

7th International Conference Radiation-thermal Effects and Processes in Inorganic Materials

材料科学;物理学

Koval, T.V.^1 ; Manakov, R.A.^1 ; Nguyen Bao, Hung^1 ; Tran My, Kim An^1

National Research Tomsk Polytechnic University, 30, Lenin Ave., Tomsk

634050, Russia^1

关键词: Discharge plasma;    Gas discharge;    Hollow cathodes;    Low pressure glow discharges;    Metals and alloys;    Nitrogen atom;    Plasma generation;    Technological parameters;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/168/1/012044/pdf
DOI  :  10.1088/1757-899X/168/1/012044

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

This research provides the numerical simulation of the plasma generation in a hollow cathode as well as the diffusion of nitrogen atoms into the metal in the low-pressure glow discharge plasma. The characteristics of the gas discharge were obtained and the relation of the basic technological parameters and the structural and phase state of the nitrided material were defined. Authors provided the comparison of calculations with the experimental results of titanium nitriding by low-pressure glow discharge plasma in a hollow cathode.