Analyzers of charged particles flows with different functional capabilities

7th International Conference Radiation-thermal Effects and Processes in Inorganic Materials

材料科学;物理学

Saulebekov, A.O.^1 ; Kambarova, Zh T^2

Lomonosov Moscow State University, Kazakhstan Branch, Kazhimukan str.11, Astana

010010, Kazakhstan^1

Ye.A. Buketov Karaganda State University, Universitetskaya str. 28, Karaganda

100028, Kazakhstan^2

关键词: Charged particle flow;    Electron optical system;    Functional capabilities;    Solid surface;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/168/1/012084/pdf
DOI  :  10.1088/1757-899X/168/1/012084

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Parameters of instruments developed on the basis of previously calculated different electron-optical systems for the analysis of charged particle flows were considered in the present work. Recommendations for their application in various fields of electron spectroscopy for the analysis of a solid surface were given.